Intelligent Focus System-Hefei I-TEK Optoelectronics Technology Co., Ltd.

Intelligent Focus System

Based on the high-speed autofocus technology developed by coaxial laser sensing I-TEK Intelligent Focus System actively senses the distance from the objective lens to the surface of the sample in focus by collecting the laser signal reflected from the corresponding sample surface, determines and outputs the control signal of the motion mechanism in real time according to the out-of-focus state of the objective lens, controlling the movement of the objective lens to the focus position to ensure that the imaging system always captures high-contrast pictures.

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Feature

High-speed real-time focusing

Intelligent focusing system supports 6.3kHz high-speed out-of-focus volume sampling, which can quickly detect the out-of-focus distance and out-of-focus direction of the target surface, and automatically and quickly adjust the focus to ensure that the surface under test can be clearly imaged in real time. In the case of a conventional 10x objective lens with 100um out of focus, the refocusing time is less than 100ms.
Sub-micron focus tracking accuracy

The Intelligent Focus System achieves sub-micron focusing accuracy, with static focusing accuracy better than 1/4 depth of field and dynamic tracking focusing accuracy better than 1/2 depth of field.
Excellent scene adaptability

Intelligent focus system supports line segmented laser sampling, which is compatible with more complex target surface texture and meets the stringent detection requirements; meanwhile, it provides three laser wavelengths of 660/785/850nm to adapt to different imaging wavelength requirements.
Wide Focusing Range

At regular objective magnification, the Intelligent Focus System has a wide enough focus range to compensate for height positioning deviations when loading the target and adapt to more complex focusing scenarios.
Flexible Component Configuration

Intelligent focus system supports multi-objective lens switching application, which can cope with defect detection scenes requiring multiple review magnifications; it is also compatible with multiple camera target surfaces, bright/dark field light sources and Z-axis actuators, and all components can be freely selected according to the actual use of the scene, so that it can cope with the visual application of different scenes with ease.

Cases

I-TEK's intelligent focusing system is now widely used and highly recognized in sub-micron high-precision inspection scenarios in display panels, semiconductors, PCBs, biomedical and other fields.

Wafer Defect Inspection

Curved Screen Inner Arc Inspection

Display Panel Front End Inspection

Standards

Project Model	IFU-S6
Sampling Rate	160Hz-4.9kHz
Linear Focusing Range (um)	±3000,±1000,±700,±300,±100
Objective Magnification	2x,5x,10x,20x,50x
Focusable Range (um)	±20000,±13000,±5000,±2500,±800
NA	0.055,0.14,0.28,0.42,0.55
Depth of Field	91um,14um,3.6um,1.6um,0.9um
Dynamic Tracking and Focusing Accuracy	Better than 1/2 objective depth of field
Static Focusing Accuracy	Better than 1/4 objective depth of field
Focusing Repeatability	Better than 1/4 objective depth of field
Image Sensor	Area Scan CMOS
Laser	660nm/785nm/850nm Semiconductor laser, The output power of the light outlet is 0.4-4mW
Laser Shape	Linear
Focusable Reflectivity	1-99%
Working Environment Temperature	10-35℃
Module Weight	385g
Size	4550128mm
Single Focus Time	Less than 100ms (10X objective lens defocused by 100um)
Power Supply	12-24V DC
Power Dissipation	3W
Motion Control Signal Output	Pulse+direction or analog signal (0-10V)
Communication Mode	RS485
Laser Control	RS485